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  • 2 months ago
China has made a major breakthrough in chip manufacturing technology, particularly in lithography — the process used to print intricate circuit patterns on silicon wafers. A research team from Peking University has, for the first time, visualized the 3D molecular movement of photoresist materials in a liquid environment using cryo-electron tomography (cryo-ET). Photoresist acts as a light-sensitive layer that transfers circuit designs during chip production. Understanding its molecular structure and behavior is critical for precision, especially in chips below the 7 nm scale.

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00:00China has made a major breakthrough in chip manufacturing technology, particularly in lithography,
00:06the process used to print intricate circuit patterns on silicon wafers.
00:10A research team from Peking University has, for the first time,
00:14visualized the 3D molecular movement of photoresist materials in a liquid environment
00:19using cryo-electron tomography, cryo-ET.
00:23Photoresist acts as a light-sensitive layer that transfers circuit designs during chip production.
00:28Understanding its molecular structure and behavior is critical for precision,
00:33especially in chips below the 7nm scale.
00:38This achievement solves long-standing challenges of observing molecular motion in real-time,
00:43mapping 3D structures, and achieving ultra-high sub-5nm resolution.
00:48With these advancements, China can now better control defects in lithography,
00:53etching, and cleaning stages, improving chip yields and performance.
00:56The discovery marks a major step towards self-reliance and innovation in semiconductor technology.
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